On the growth, orientation and hardness of chemical vapor deposited Ti(C,N)
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2018
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2017.10.037